Keywords
MicroelectronicsSilicon dioxideSiliconDielectricTransistorEngineering physicsComputer scienceMaterials scienceOptoelectronicsFabricationElectrical engineeringNanotechnologyEngineering
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Publication Info
- Year
- 2000
- Type
- article
- Volume
- 406
- Issue
- 6799
- Pages
- 1032-1038
- Citations
- 1265
- Access
- Closed
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Cite This
Angus I. Kingon,
Jon‐Paul Maria,
S. K. Streiffer
(2000).
Alternative dielectrics to silicon dioxide for memory and logic devices.
Nature
, 406
(6799)
, 1032-1038.
https://doi.org/10.1038/35023243
Identifiers
- DOI
- 10.1038/35023243