Abstract
Nanograting structures in either thermally or UV curable resist are continuously fabricated on a flexible plastic substrate by a high-speed roll-to-roll nanoimprint apparatus (see figure). As an example of the applications of such a roll-to-roll imprinting process, a high-performance metal wire-grid polarizer is demonstrated.
Keywords
Nanoimprint lithographyMaterials scienceRoll-to-roll processingPolarizerResistLithographyOptoelectronicsNanotechnologyFabricationOptics
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Publication Info
- Year
- 2008
- Type
- article
- Volume
- 20
- Issue
- 11
- Pages
- 2044-2049
- Citations
- 608
- Access
- Closed
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Cite This
Se Hyun Ahn,
L. Jay Guo
(2008).
High‐Speed Roll‐to‐Roll Nanoimprint Lithography on Flexible Plastic Substrates.
Advanced Materials
, 20
(11)
, 2044-2049.
https://doi.org/10.1002/adma.200702650
Identifiers
- DOI
- 10.1002/adma.200702650