Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering

Keywords

Materials scienceNitrideAlloySputteringAmorphous solidCrystallinityThin filmMetallurgyAnalytical Chemistry (journal)Composite materialNanotechnologyCrystallographyLayer (electronics)Chemistry

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Publication Info

Year: 2004
Type: article
Volume: 188-189
Pages: 193-200
Citations: 549
Access: Closed

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APA Style

                            
                                    Ta-Kun Chen, 
                                
                                    Tao-Tsung Shun, 
                                
                                    Jien‐Wei Yeh
                                
                                et al.
                            
                            (2004). 
                            Nanostructured nitride films of multi-element high-entropy alloys by reactive DC sputtering. 
                            Surface and Coatings Technology
                            , 188-189
                            
                            , 193-200.
                            https://doi.org/10.1016/j.surfcoat.2004.08.023

Identifiers

DOI: 10.1016/j.surfcoat.2004.08.023