Keywords
Porous siliconSilicon on insulatorMaterials scienceSiliconPorosityNanotechnologyPorous mediumLayer (electronics)ThermalEngineering physicsOptoelectronicsComposite materialEngineering
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Publication Info
- Year
- 1988
- Type
- article
- Volume
- 8
- Issue
- 3-4
- Pages
- 293-310
- Citations
- 154
- Access
- Closed
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Cite This
G. Bomchil,
A. Halimaoui,
R. Hérino
(1988).
Porous silicon: The material and its applications to SOI technologies.
Microelectronic Engineering
, 8
(3-4)
, 293-310.
https://doi.org/10.1016/0167-9317(88)90022-6
Identifiers
- DOI
- 10.1016/0167-9317(88)90022-6