Room temperature photoluminescence from etched silicon surfaces: The effects of chemical pretreatments and gaseous ambients

Keywords

PhotoluminescenceAdsorptionOxygenSiliconChemistryThermal oxidationAnalytical Chemistry (journal)Isotropic etchingTemperature cyclingIntensity (physics)ThermalMaterials scienceChemical engineeringPhotochemistryChemical physicsEtching (microfabrication)Physical chemistryOpticsOptoelectronicsEnvironmental chemistryThermodynamicsOrganic chemistry

Affiliated Institutions

King's College London GB

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Publication Info

Year: 1986
Type: article
Volume: 47
Issue: 4
Pages: 363-373
Citations: 15
Access: Closed

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APA Style

                            
                                    Leigh Canham
                                
                            (1986). 
                            Room temperature photoluminescence from etched silicon surfaces: The effects of chemical pretreatments and gaseous ambients. 
                            Journal of Physics and Chemistry of Solids
                            , 47
                            (4)
                            , 363-373.
                            https://doi.org/10.1016/0022-3697(86)90026-0

Identifiers

DOI: 10.1016/0022-3697(86)90026-0