Keywords
Atom (system on chip)SputteringDeposition (geology)Vacancy defectAtomic physicsLayer (electronics)ChemistryRange (aeronautics)Molecular physicsMaterials scienceCrystallographyThin filmNanotechnologyPhysics
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Publication Info
- Year
- 1995
- Type
- article
- Volume
- 324
- Issue
- 1
- Pages
- 35-46
- Citations
- 33
- Access
- Closed
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Cite This
Marie Villarba,
Hannes Jónsson
(1995).
Atomic exchange processes in sputter deposition of Pt on Pt(111).
Surface Science
, 324
(1)
, 35-46.
https://doi.org/10.1016/0039-6028(94)00631-8
Identifiers
- DOI
- 10.1016/0039-6028(94)00631-8