Keywords
Electrical impedanceMaterials scienceDielectric spectroscopySurface roughnessSurface finishPolymerAnalytical Chemistry (journal)Scanning electron microscopeCapacitive sensingSiliconOptoelectronicsComposite materialChemistryElectrodeElectrical engineering
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Publication Info
- Year
- 1999
- Type
- article
- Volume
- 72
- Issue
- 3
- Pages
- 203-216
- Citations
- 28
- Access
- Closed
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Cite This
Shankarram A. Athreya,
David C. Martin
(1999).
Impedance spectroscopy of protein polymer modified silicon micromachined probes.
Sensors and Actuators A Physical
, 72
(3)
, 203-216.
https://doi.org/10.1016/s0924-4247(98)00223-4
Identifiers
- DOI
- 10.1016/s0924-4247(98)00223-4