Integrated nanotube circuits: Controlled growth and ohmic contacting of single-walled carbon nanotubes

H. Tom Soh; C. F. Quate; Alberto F. Morpurgo; C. M. Marcus; Jing Kong; Hongjie Dai

doi:10.1063/1.124462

Abstract

Single-walled carbon nanotubes are synthesized by chemical vapor deposition of methane at controlled locations on a substrate using patterned catalytic islands. The combined synthesis and microfabrication technique presented here allows a large number of ohmically contacted nanotube devices with controllable length to be placed on a single substrate. Transport studies demonstrate ohmic contacting, giving two-terminal resistances as low as 20 kΩ at low temperatures.

Keywords

Carbon nanotubeOhmic contactMaterials scienceMicrofabricationSubstrate (aquarium)Chemical vapor depositionNanotechnologyNanotubeCarbon nanotube actuatorsPotential applications of carbon nanotubesCarbon nanotube quantum dotOptoelectronicsOptical properties of carbon nanotubesChemical engineeringFabrication

Affiliated Institutions

Stanford University US

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Publication Info

Year: 1999
Type: article
Volume: 75
Issue: 5
Pages: 627-629
Citations: 262
Access: Closed

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APA Style

                            
                                
                                    H. Tom Soh, 
                                
                                    C. F. Quate, 
                                
                                    Alberto F. Morpurgo
                                
                                et al.
                            
                            (1999). 
                            Integrated nanotube circuits: Controlled growth and ohmic contacting of single-walled carbon nanotubes. 
                            Applied Physics Letters
                            , 75
                            (5)
                            , 627-629.
                            https://doi.org/10.1063/1.124462
                        

Identifiers

DOI: 10.1063/1.124462