Single-Crystal Epitaxial Thin Films of the Isotropic Metallic Oxides Sr 1– x Ca x RuO 3 (0 ≤ × ≤ 1)

Chang‐Beom Eom; R. J. Cava; R. M. Fleming; Julia M. Phillips; Robert Bruce vanDover; John Marshall; Julia W. P. Hsu; J. J. Krajewski; W. F. Peck

doi:10.1126/science.258.5089.1766

Abstract

Single-crystal epitaxial thin films of the isotropic metallic oxides Sr 1– x Ca x RuO 3 (0 ≤ x ≤ 1) were grown on miscut SrTiO 3 (100) substrates in situ by 90° off-axis sputtering. These thin films exhibit low isotropic resistivities, excellent chemical and thermal stability, good surface smoothness, and high crystalline quality. Furthermore, the lattice parameters and magnetic properties can be varied by simply changing the strontium/calcium ratio. These epitaxial thin films, and their multilayer structures with other oxide materials, can be used for the fabrication of superconducting, ferroelectric, magneto-optic, and electro-optic devices.

Keywords

Materials scienceThin filmEpitaxySputteringFerroelectricityIsotropyStrontiumCrystal (programming language)FabricationOxideThermal stabilityCrystal growthStrontium titanateSingle crystalMetalSuperconductivityCondensed matter physicsOptoelectronicsMineralogyCrystallographyNanotechnologyOpticsChemistryDielectricMetallurgy

Affiliated Institutions

AT&T (United States) US

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Publication Info

Year: 1992
Type: article
Volume: 258
Issue: 5089
Pages: 1766-1769
Citations: 559
Access: Closed

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APA Style

                            
                                
                                    Chang‐Beom Eom, 
                                
                                    R. J. Cava, 
                                
                                    R. M. Fleming
                                
                                et al.
                            
                            (1992). 
                            Single-Crystal Epitaxial Thin Films of the Isotropic Metallic Oxides Sr <sub> 1– <i>x</i> </sub> Ca <sub> <i>x</i> </sub> RuO <sub>3</sub> (0 ≤ × ≤ 1). 
                            Science
                            , 258
                            (5089)
                            , 1766-1769.
                            https://doi.org/10.1126/science.258.5089.1766
                        

Identifiers

DOI: 10.1126/science.258.5089.1766

Single-Crystal Epitaxial Thin Films of the Isotropic Metallic Oxides Sr <sub> 1– <i>x</i> </sub> Ca <sub> <i>x</i> </sub> RuO <sub>3</sub> (0 ≤ × ≤ 1)