Ion Beam Lithography
Apparatus and method for projection ion beam lithography are described which allow formation of low distortion, large field, reduced images of a mask pattern at a wafer plane us...
Publications
1 shownFrequent Co-Authors
Researcher Info
- h-index
- 1
- Publications
- 1
- Citations
- 7
- Institution
- IMS Nanofabrication (Austria)
External Links
Impact Metrics
h-index
1
h-index: Number of publications with at least h citations each.