Keywords
NanoindentationMaterials scienceComposite materialSapphireIndentationThin filmElastic modulusStiffnessSubstrate (aquarium)Indentation hardnessAluminiumSiliconContact mechanicsContact areaMicrostructureMetallurgyNanotechnologyOpticsStructural engineering
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Publication Info
- Year
- 2002
- Type
- article
- Volume
- 50
- Issue
- 1
- Pages
- 23-38
- Citations
- 1514
- Access
- Closed
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Cite This
Ranjana Saha,
William D. Nix
(2002).
Effects of the substrate on the determination of thin film mechanical properties by nanoindentation.
Acta Materialia
, 50
(1)
, 23-38.
https://doi.org/10.1016/s1359-6454(01)00328-7
Identifiers
- DOI
- 10.1016/s1359-6454(01)00328-7